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SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.

  • High purity chemical valves
  • Single type and stacking type for manifold
  • Orifice diameter: ø4, ø8, ø12, ø20
  • Port sizes: 1/8, 1/4, 3/8, 1/2, 3/4, 1
  • Body material: SUS, PPS, PFA
  • Options: flow rate adjustment, indicator
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