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SEMI Standard Chiller

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  Both the pump and compressor rotations are inverter controlled for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations.  This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

SMC ETech Logo
SMC ETech Logo
SMC ETech Logo
SMC ETech Logo
SMC ETech Logo
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